KD Diaphragm Valve

The KD series realizes a high Cv value for compactly designed direct diaphragm valves. These valves are of the quality that they can handle the high-purity gases used in semiconductor production facilities, and they also have high durability and high corrosion resistance performance. 

Features

• Excellent purge characteristic is realized by minimizing the internal volume to 1.2cm3 (1 /4" Male eve, Open) through reduction of vertical flow paths. 
• Original wetted area seal mechanism enables highest sealing performance, durability, purge performance, and corrosion resistance. 
• High corrosion resistance performance by carefully selected diaphragm materials and ultimately smallest individual differences based on KITZ Sers original 
• molding method realized high durability performance. 
• Handles high-purity gases used with semiconductors and pursues particle performance to the ultimate degree by means of the highest-level production environment and polished inner surfaces. 

KCD Compact Diaphragm Valve

The KCD series consists of KD series-based direct diaphragm valves that have been made more compact. 

The basic performance is that of high-spec valves that inherited everything from the KD series, our high-end model. 

Features

• With the KCD series, KITZ SeT succeeded in reducing the internal volume to 0.97 cm3, versus the 1.2 cm3 (1 /4" eve male, open position).
• While keeping the same design as KD series, it achieved 20% reduction in external size, and the weight is also reduced. (Avaliable only in 1/4")
• The durability performance was not compromised, and achieved 2 million cycles (actual value) for the Pneumaticvalve and 100,000 cycles (actual value) for the 
• manual valve. 
• The highest level production environment and polish quality makes them suitable for use with high purity gases and achieves ultimate particle performance.

VLCD Compact Diaphragm Valve

The VLCD series achieves commonization of parts and utilizes a forged body while maintaining the performance of the conventional KD series. 

Features

• Achieves 20% reduction in external size as compared to the conventional KO series. (Available only in 1 /4") 
• Achieves low cost pricing through commonization of parts and utilization of a forged body. 
• Because the cleaning and inspection processes are the same as our conventional prod-ucts, the VLCD series can be used in the manufacturing of Semiconductor, FPO, and LED production devices.

VLD Diaphragm Valve

The VLD series embodies the pursuit of simplicity and utility found in the KD series. The VLD series achieves simplification through the minimization of the number of critical parts. 

Features

• While maintaining the same degree of basic performance, material, and cleaning, the VLD series realizes security and low cost through overall reduction of the number of parts and changes to the review and processing methodology. 
• Because the cleaning and inspection processes are the same as our conventional mod-el, there is no change in reliability and durability. 
• Achieves maximum particle performance for high-purity gases used in semiconductor by the highest-level manufacturing environment and polishing process.

WD Diaphragm Valve for Liquid Gas Delivery

The WD series valves are high performance diaphragm valves suitable for liquid materials. 

Features

• Capable of using high purity liquid materials such as TEOS used for semiconductor and liquid-crystal production. 
• Seat assembly can be replaced on the user side while maintaining the valve's basic properties, particle performance, and purge characteristics. 
• Effective in improving ease of maintenance and reducing running costs for chemical canisters that require periodic cleaning. 
• Seat assembly replacement tool is the same for both manual and pneumatic operation. 
• With an actuator diameter of ¢ 39. 7mm, it is possible to suport a 40mm line pitch.

RD High Pressure Diaphragm Valves

The RD series diaphragm valves are high pressure valves with compact body and lower operation torque. 

Features 

Manual Valve

• Large diameter wheel handle provides smooth operation feel. 
• The valves employ a large window and easy-to-see OPEN/CLOSE display so that the state of the valve can be confirmed at a glance. 

Pneumatic Valve 

• The new type vertical cylindrical actuator accommodates a minimal line pitch, so there is no need to worry about the orientation after installation. 
• A compact, high-durability actuator is realized as a result of adopting KITZ SCT's patented wedge-type force booster. 
• The rigidity of the joint between the actuator and the body is further increased for improved reliability. 
• Stable opening and closing operation is ensured even at the lower limits of operating pressure, 0.4-0.7 MPa (G). 

VRD Diaphragm Valves

The "VRD" series is a 1/4" high pressure direct diaphragm valve for 20.6 Mpa en-closed gas pressure. 

Perfect for machines with internal plumbing and gas lines which must completely prevent leaks relating to high pressure, high temperature, and high vacuum (Cylin-der Cabinet, BSGS). 

Features

• Takes the same perfomance as the existing RD series and achieves lower cost through the reduction of the number of parts. 
• Operation torque reduced compared to RD seris. 
• Compact size compared to conventional products by reducing height by 6mm. 
• More simple, compact, and with lower cost compared to previous designs.

Mono Block Valves  Block-type

Features

• Excellent degassing characteristics is achieved through minimized flow paths by combining 2 of the KD, KCD, or RD valves together in one valve body. 
• The basic performance is inherited from the performance of the base valves, and an extremely compact panel design can be achieved by combining the actuators of choice in one valve body. 
• The optimal flow layout can be made through selection of various flow systems, pipe routing, and fittings. 
• A series of three or more actuator block valves can also be produced for special applications.