제품소개

반도체 및 평판디스플레이(FPD) 제조 관련 장비, 계측기, 부품, Chemical 전문 공급 기업

Gas Item

고순도 가스계 밸브IGS Valve



TD/TCD B-SEAL IGS Valves

TD/TCD Series is a group of compact valves for the accumulated gas system (BIS/ BISF) that is developed by KITZ SCT. 


Valve Features

  • KITZ-SCT's unique B-SEAL structure: Speedy and sure installation is made possible due to its center-lock mechanism. Reduction of assembly process and time re-
  • quired for the maintenance by user is expected to contribute to an overall cost reduction. 
  • Using KITZ-SCT's unique snap mechanism incorporated in manual valves extensively facilitates the operation even in a limited working space. In addition, the valve can be operated by one-touch, which helps avoid insufficient or excessive torque when turning the handle to either end, and thus increases an operational reliability. Considering safety, a miss-operation protective mechanism (fixing screw) is newly adopted. 
  • The valve is equipped with a mechanism to avoid miss-insertion and miss-installation by means of notch located on the base. 
  • The seal type use 1 /B"CVC fitting that has been proven in a conventional gas system.

 




TD/TCD C-SEAL IGS Valves

TD/TCD Series is a group of compact valves for l.125inch-C-SEAL. 


Valve Features

  • These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125" C-SEAL. Both manual and pneumatic valves in this series incorporate a compact actuator, which allows the valve to suit to fine line pitches. 
  • The manual valves are 90° open/close types, and capable to equip a lock key for preventing miss-operations. 
  • TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series. 
  • The surface that comes in contact with gases are made rich in chrome, and achieved Cr/Fe >2.0.(SEP specification) 
  • Achieving Hv300 on the sealing surface, repeated detachability is further improved. 



다운로드