제품소개

반도체 및 평판디스플레이(FPD) 제조 관련 장비, 계측기, 부품, Chemical 전문 공급 기업

Gas Item

진공배기계 밸브APC Butterfly Valve



PCA Series

APC Butterfly Valve


Feature

Open and close

  • After the seat ring allows slow exhaust, it moves away to allows the flapper to rotating for pressure control.

New developed seat ring structure

  • O-ring twisting and dislodging. Furthermore, our grease free flapper sealing minimizes contamination.

Slow exhaust

  • Slow exhaust starts as the seat ring moves away from the O-ring seal.

High durability

  • Increases durability by reducing the O-ring stress using our seat ring structure.
  • Full open <-> Full close : 3 million cycles

Pressure control

  • Wide range of pressure control from low to high vacuum with combination of our seat ring and fl apper.

Reduce by-product adhesion with unique heating feature.

  • Internal heater inside the flapper reduces by-products adhesion in the flow path drastically.
  • (The internal heater is optional)


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