lnline Ceramic Gas Filter

High Accuracy Filtration

• For sub micron LSI processes, it is indispensable to supply high purity process gas to use point. Ultra clean piping was also a major concern for this purpose. To cope with such requirements, Pureron Japan has developed completely new filters using ceramic as filtering element and achieved 0.003µm high accuracy filtration under stable condition.

High Selectivity Indispensable for Etching and Thin Film 

• Removal of impurity such as water and oxygen is very important seeking for high selectivity. High temperature baking is indispensable in order to surely remove impurity. Pureron Japan's ceramic filter has been developed from this viewpoint and high temperature baking at 200° C is possible.

Cost Reduction by Maintenance-Free Operations

• Trilaminar filtration structure, depending on size of particle diameter, rarely generates clogging. Ceramic filter also offers superior durability and heat resistance compared with conventional filter. Consequently, little loss caused by down time of production realizes cost reduction in long term.

다운로드

low Pressure loss/ Hig  Accuracy Filtration Ceramic Gas Filter 

High Accuracy Filtration/ Low Pressure Loss 

• Low pressure loss is realized keeping high efficiency filtration of PGF series. Flow rate can be approximately doubled in the same dimensions as PGF series.

다운로드

Low Pressure Loss lnline Ceramic Gas Filter

Low Pressure Loss 

Extremely low pressure is realized, OUT side pressure of 􀀁Pat 0.01 MPa against IN side pressure of 0.1 MPa at 10L/min nitrogen gas flow. 

High Accuracy Filtration 

0.01 µ particle removal efficiency is 99.9999999999%, contributing to significant improvement for extraction rate in sub micron ULSI production.

Minimal Flow Rate Ultra Compact Ceramic Gas Filter

Ultra Small / Light Weight 

• The SPC series is designed ultra compact (CD21 x 84mm) and light weight (90g) suitable for small space applications in cylinder cabinet and equipment. 

High Accuracy Filtration 

• High accuracy filtration is achieved by multilayered ceramic element. Zero particle count of 0.003µm is checked by CNC counter for all products before shipment. 

Low Degas Characteristic 

• Pollution by degas, mainly water from inner wall of filter is causing problems in minimal gas flow and pressure processes. Ceramic filter offers superior degas characteristics compared with all-metal filter due to remarkably lower water absorption. 

Dead Space Free 

• Minimized gas residual space provides better gas replacement performance. 

Ceramic Gas Filler with HASTELLOY®C-22

Housing I or Corrosive Special Gas 

High Corrosion Resistance

• HASTELLOY®C-22 is used for housing and ceramic for filter element. These elements have very high corrosion resistance against halogen series, such as HBr or HCI, reactive corrosive special gases and provide good performance.

Low Degas Characteristic 

• ceramic filter is suited for special gas applications such as corrosive or high reactive gases compared with stainless steel SUS316L filter due to its remarkably lower water absorption. Every filter is shipped after special cleansing by purified water and baking to perform superior degas characteristic.

High Accuracy Filtration : 0.003µm 

• High accuracy filtration is achieved by multilayered ceramic element. Zero particle count of 0.003µm is checked by CNC counter for all products before shipment.

High Flow Rate Ceramic Gas Filter

Ultra High Flow Rate 

• suitable for flow rate from 500Umin to 3,000L/min at primary side bulk gas line. 

High Accuracy Filtration 

• ceramic element with high accuracy filtration of 0.003µm is durable against pulsation, rarely generates clogging so periodical maintenance is hardly necessary. 

High Efficiency 

• with dedicated 200° C baking heater (option), degas element such as water or oxygen can be reduced to a few ppb or less.