Low Pressure Loss Metal Gas Filter

• SUS316L used for constructional material of filter, realizing high heat resistance with little possibility of corrosion or secondary material generation. 
• Out side pressure loss of L10.05MPa when 0.2MPa nitrogen gas (N2) frow pressure applied on IN side realizing 90SLM flow rate. 
• Filtration accuracy 0.003µm checked by CNC counter under constant and pulsation flows realizing significant improvement in yield in sub micron ULSI production.

다운로드

All-Metal Gas Filter for Rough Filtrati

Filtration Accuracy in Wide Range 

• Wide filtration accuracy range from 0.1 to 1 Oµm under constant and pulsation flows. 

High Corrosion Resistance 

• No corrosive material used for constructional material of filter to avoid corrosion or secondary product generation. 

Degas Characteristic 

• APIMS degas measurement (amount of water) at 1.2ppb achieved with use of dedicated baking heater. Measurement at 0.1 ppb level also achievable by continuous use of heater. Degas characteristic improved furthermore by removing impurity residue in filter by special cleansing.

Gasket Type Gas Filter (Hybrid Filter)

Compact Design

Disk type and Corn type are availlable. Hybrid filter series can be installed in the face seal fitting as a gasket.

Cost Reduction

This filter has two function of filtration and gasket. And there is no need to extra work for the installation.

High pressure and high temperature resistance

For a stainless steel material (Nickel gasket is available on PGH series), the products support a high temperature and high pressure(PGT series).

High Accuracy Filtration All-Metal Gas Filler 

• SUS316L stainless steel used for every part 
• High cleansing level: Internal special cleansing and high temperature baking with high purity N2 gas for all products before shipment. 
• High efficiency particle removal of 0.003µm or more under high flow rate and high differential pressure. 
• High heat resistance 460°C 
• Wide range of models available from low flow rate about 1 OL/min to medium flow rate about 250L/min. 
• Low pressure loss: Extremely lower pressure loss and compact size compared with conventional metal filter realizing high gas flow rate.