Use point impurity such as water, oxygen and hydrocarbon included in inactive or special gas removed down to 1 PPB or less under certain conditions.
SUS316L used as standard material for rough filtration media not generating particle by corrosion or chemical reaction.
Water included in high corrosion special gas such as HBr and HCI removed up to 1 OOPPB (detection limit of analysis equipment) or less under certain conditions.
Same small size and light weight as GP-05 filter with 84mm face-to-face dimension and 120g in weight.
Usable until complete lifetime by reactivation process by baking at 350° C to 400° C depending on gas type.
Ultra High Purity Compact Gas Purifie
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