제품소개

반도체 및 평판디스플레이(FPD) 제조 관련 장비, 계측기, 부품, Chemical 전문 공급 기업

Gas Item

가스 정제 장치Ultra High Purity Compact Gas Purifie



Ultra High Purity Compact Gas Purifie


  • Use point impurity such as water, oxygen and hydrocarbon included in inactive or special gas removed down to 1 PPB or less under certain conditions. 
  • SUS316L used as standard material for rough filtration media not generating particle by corrosion or chemical reaction. 
  • Water included in high corrosion special gas such as HBr and HCI removed up to 1 OOPPB (detection limit of analysis equipment) or less under certain conditions. 
  • Same small size and light weight as GP-05 filter with 84mm face-to-face dimension and 120g in weight. 
  • Usable until complete lifetime by reactivation process by baking at 350° C to 400° C depending on gas type.


다운로드